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20 March 2007 Development of micro-mirrors in optical-electric printed wiring boards using excimer laser
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Abstract
Using excimer laser with 248 nm wavelength, we have been developed the 45-degree micro-mirrors in the polymer optical waveguide constructed by newly developed epoxy resin. The three-dimensional laser processing technology for controlling the mask aperture size on the laser beam is effective for fabricating the 45-degree mirror. The size of the mirror was about 80 micrometer width. Although the periodical micro patterns have appeared on the surface of the mirrors, we have successfully removed the patterns by the technique of smoothing. Smoothing process has been carried out by the additional laser irradiation with weak and/or strong energy. The obtained surface roughness of the mirrors was less than 120 nm (Ry). The evaluation of the optical loss using laser with 670 nm wavelength resulted in the less than 0.5 dB, indicating sufficient mirror performance.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Matsushima, K. Tanaka, T. Nakashiba, Y. Yagyu, and M. Kubo "Development of micro-mirrors in optical-electric printed wiring boards using excimer laser", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590A (20 March 2007); https://doi.org/10.1117/12.700116
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