Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns

Claire Mullan; Diana Ilie; Gerard M. O'Connor; Sebastian Favre; Thomas J. Glynn

doi:10.1117/12.700592

20 March 2007 Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns

Claire Mullan, Diana Ilie, Gerard M. O'Connor, Sebastian Favre, Thomas J. Glynn

Proceedings Volume 6459, Laser-based Micro- and Nanopackaging and Assembly; 64590G (2007) https://doi.org/10.1117/12.700592
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

A solid-state UV laser was used to make arrays of reproducible percussion-drilled micron-sized holes in polyimide. An optical switch was employed as a pulse picker to select specific patterns of pulses from the high repetition rate laser beam. The ability to control and vary the number of pulses per burst and the time between bursts enhanced the drilling rate while minimizing thermal damage around the holes. The optimum pulse patterns were determined experimentally. A photodiode acted as a breakthrough sensor to end the drilling and optimize the exit hole size and quality. Results were compared with computer simulations of the drilling process based on modeling of the laser/material interaction.

Citation Download Citation

Claire Mullan, Diana Ilie, Gerard M. O'Connor, Sebastian Favre, and Thomas J. Glynn "Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590G (20 March 2007); https://doi.org/10.1117/12.700592

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