Cyclic thin film flexible pressure sensor testing

Hee C. Lim; James L. Zunino III; John F. Federici

doi:10.1117/12.704223

19 January 2007 Cyclic thin film flexible pressure sensor testing

Hee C. Lim, James L. Zunino III, John F. Federici

Proceedings Volume 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; 64630A (2007) https://doi.org/10.1117/12.704223
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

The meantime between failures of the thin film strain sensor is a critical indicator for future U.S. Army field sensing application [1]. This accelerated lifetime aging test would characterize the existing flexible strain sensor for repeated load response/application. A typical industrial maximum number of testing cycles used are about 10x10⁶ cycles [2].

Citation Download Citation

Hee C. Lim, James L. Zunino III, and John F. Federici "Cyclic thin film flexible pressure sensor testing", Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630A (19 January 2007); https://doi.org/10.1117/12.704223

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