A fast model-order reduction algorithm for microelectromechanical devices

Rumi Zhang; Peiyu Zhang; Graham A. Jullien

doi:10.1117/12.709023

19 January 2007 A fast model-order reduction algorithm for microelectromechanical devices

Rumi Zhang, Peiyu Zhang, Graham A. Jullien

Proceedings Volume 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; 64630P (2007) https://doi.org/10.1117/12.709023
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

A fast model-order reduction algorithm is proposed for microelectromechanical devices. By breaking the system matrices obtained from FEM methods down into smaller ones, the proposed algorithm will reduce computational cost and memory requirements required by the inversion operation of the system matrix. As an example, experimental studies are presented for a linear-drive multiple-mode resonator demonstrating that predicted results are in very good agreement with results from previous publications.

Citation Download Citation

Rumi Zhang, Peiyu Zhang, and Graham A. Jullien "A fast model-order reduction algorithm for microelectromechanical devices", Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630P (19 January 2007); https://doi.org/10.1117/12.709023

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