LVD micromirror for rapid reference scanning in optical coherence tomography

Xiaoxing Feng; Ankur Jain; Sagnik Pal; Lei Xiao; Toshikazu Nishida; Huikai Xie

doi:10.1117/12.703221

12 February 2007 LVD micromirror for rapid reference scanning in optical coherence tomography

Xiaoxing Feng, Ankur Jain, Sagnik Pal, Lei Xiao, Toshikazu Nishida, Huikai Xie

Proceedings Volume 6464, MEMS/MOEMS Components and Their Applications IV; 64640M (2007) https://doi.org/10.1117/12.703221
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

A translationally-scanning mirror is always desired for the axial scanning in optical coherence tomography (OCT), but conventional scanners are bulky and have relatively slow scanning speed. This paper reports a micromirror that has the potential to achieve both the scanning speed and range required by OCT. The large piston motion of the micromirror is obtained using a large-vertical-displacement (LVD) microactuator. The device is fabricated using a deep-reactive-ion-etch (DRIE) CMOS-MEMS process. A pair of electrothermal bimorph actuators is employed to achieve tilt-free mirror plate and large piston motion. A linear voltage divider with a voltage ratio of 1:2.3 between the two electrothermal actuators has been used to obtain static displacements up to 200 &mgr;m. The frequency response of this device was obtained using a laser Doppler vibrometer, and resonant peaks were observed at 1.18 and 2.62 kHz. AC signals at 50 Hz with a voltage ratio of 1:1.2 were supplied to the actuators, and the maximum dynamic piston motion was measured to be 26 &mgr;m. The decreasing amplitude over increasing frequency was caused by the heat-sink effect of the mirror plate. A phase delay between the two actuators was also observed.

Citation Download Citation

Xiaoxing Feng, Ankur Jain, Sagnik Pal, Lei Xiao, Toshikazu Nishida, and Huikai Xie "LVD micromirror for rapid reference scanning in optical coherence tomography", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640M (12 February 2007); https://doi.org/10.1117/12.703221

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