Optimization of COC hot embossing with soft PDMS tools

Kaichang Zhou; Ian Papautsky

doi:10.1117/12.701281

22 January 2007 Optimization of COC hot embossing with soft PDMS tools

Kaichang Zhou, Ian Papautsky

Proceedings Volume 6465, Microfluidics, BioMEMS, and Medical Microsystems V; 64650R (2007) https://doi.org/10.1117/12.701281
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

In this paper, Taguchi optimization method was used to investigate a COC (cyclic olefin copolymer) hot embossing using soft PDMS (polydimethylsiloxane) tools. Because of the PDMS tool's soft intrinsic nature, replication errors occur due to deformation during the hot embossing. The parameters, which affect on the replication quality, such as temperature, embossing force, and hold time were selected as the control factors. Four level, L₁₆ (4⁵) orthogonal array of Taguchi method was use to develop the optimal process. Height and width of the embossed channels were defined as quality characteristics. The result of the analysis indicated temperature to be the most significant factor that substantially affects replication fidelity. The optimized embossing process with soft PDMS tools can now be used to rapidly replicate microfluidic devices having both small and large features with confidence.

Citation Download Citation

Kaichang Zhou and Ian Papautsky "Optimization of COC hot embossing with soft PDMS tools", Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems V, 64650R (22 January 2007); https://doi.org/10.1117/12.701281

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