Miniaturized FTIR-spectrometer based on an optical MEMS translatory actuator

Thilo Sandner; Andreas Kenda; Christian Drabe; Harald Schenk; Werner Scherf

doi:10.1117/12.697898

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22 January 2007 Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator

Thilo Sandner, Andreas Kenda, Christian Drabe, Harald Schenk, Werner Scherf

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Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 646602 (2007) https://doi.org/10.1117/12.697898
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

In this paper we present a MOEMS based miniaturized Fourier-transform infrared (FTIR) spectrometer capable to perform time resolved measurements from NIR to MIR. The FTIR-spectrometer is based on a MOEMS translatory actuator which replaces the macroscopic mirror drive enabling a miniaturized, robust and low cost FTIR system. The MOEMS device is manufactured in a CMOS compatible process using SOI technology. Due to the electrostatic driving principle based on in-plane electrode combs, 200 μm stroke can be achieved with comparatively low voltages (<40 V) at an ambient pressure below 500 Pa. The actuator plate, acting as mirror with an area of 1.65 mm², operates at a resonant frequency of 5 kHz. Consequently this yields a maximum spectral resolution of 25 cm^-1 and an acquisition time of 200 μs per spectrum. Based on a Michelson setup the infrared optical bench of the presented FTIR system is designed to account for the mirror aperture and the desired spectral bandwidth of 2 μm to 5 μm. The integrated signal processing electronics has to cope with a bandwidth of 8 MHz as a result of the mirror motion. A digital signal processor manages system control and data processing. The high acquisition rate and integration level of the system makes it appropriate for applications like process control and surveillance of fast reactions. First results of transmission and absorbance measurements are shown. In addition we present a novel MOEMS device with increased mirror aperture and stroke which will be used for further optimization of the spectral FTIR-resolution.

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Thilo Sandner, Andreas Kenda, Christian Drabe, Harald Schenk, and Werner Scherf "Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646602 (22 January 2007); https://doi.org/10.1117/12.697898

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