Electrostatic 1D microscanner with vertical combs for HD resolution display

Jin-Woo Cho; Yong-Hwa Park; Young-Chul Ko; Byeung-Leul Lee; Seok-Jin Kang; Seok-Whan Chung; Won-kyoung Choi; Yong-Chul Cho; Seok-Mo Chang; Jin-Ho Lee; John Sunu

doi:10.1117/12.702163

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22 January 2007 Electrostatic 1D microscanner with vertical combs for HD resolution display

Jin-Woo Cho, Yong-Hwa Park, Young-Chul Ko, Byeung-Leul Lee, Seok-Jin Kang, Seok-Whan Chung, Won-kyoung Choi, Yong-Chul Cho, Seok-Mo Chang, Jin-Ho Lee, John Sunu

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Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660B (2007) https://doi.org/10.1117/12.702163
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

An electrostatic 1 dimensionally (1D) scanning mirror for HD resolution display is introduced. Vertical comb drive was used to tilt the micro mirror. To minimize the moment of inertia and maximize the tilting angle of the mirror having the diameter of 1.6 mm, the rib was patterned on the backside of the mirror surface and optimized. Via the finite element simulation, the dynamic deformation of 45nm was achieved within the reflecting area in operating resonant mode thanks to the optimized rib structure. The actuating part of scanner was also optimized manipulating with several design variables to get maximum tilting angle. As the fabrication result, mechanical tilting angle of ±12.0 degree was achieved with the resonant frequency of 24.75kHz and the sinusoidal driving voltage of 280Vpp. For stable resonant motion of the scanner, the feedback control algorithm was realized in the driving circuit. Rigorous reliability characterization was carried out using statistical analysis on the fabricated samples. As a result, HD-resolution image with 720 progressive horizontal lines was demonstrated.

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Jin-Woo Cho, Yong-Hwa Park, Young-Chul Ko, Byeung-Leul Lee, Seok-Jin Kang, Seok-Whan Chung, Won-kyoung Choi, Yong-Chul Cho, Seok-Mo Chang, Jin-Ho Lee, and John Sunu "Electrostatic 1D microscanner with vertical combs for HD resolution display", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660B (22 January 2007); https://doi.org/10.1117/12.702163

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