Adaptive scanning optical microscope (ASOM): large field of view and high resolution imaging using a MEMS deformable mirror

Benjamin Potsaid; Linda Ivonne Rivera; John Ting-Yung Wen

doi:10.1117/12.700538

9 February 2007 Adaptive scanning optical microscope (ASOM): large field of view and high resolution imaging using a MEMS deformable mirror

Benjamin Potsaid, Linda Ivonne Rivera, John Ting-Yung Wen

Author Affiliations +

Proceedings Volume 6467, MEMS Adaptive Optics; 646706 (2007) https://doi.org/10.1117/12.700538
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

For a wide range of applications in biology, medicine, and manufacturing, the small field of view associated with high resolution microscope systems poses a significant challenge in practice. This paper describes an optical microscope design, called the Adaptive Scanning Optical Microscope (ASOM), which uses a MEMS deformable mirror working with a specially designed scanning lens to achieve a greatly expanded field of view. Most adaptive optics systems (e.g. telescopes and ophthalmology instruments) are designed to achieve near ideal performance under nominal operating conditions and primarily use the adaptive optics element to compensate for a time varying disturbance to the wavefront that is external to the optical system. In contrast to this approach, the deformable mirror in the ASOM is an integral component of the optical system and the static (glass) optical elements have been specifically designed to match the shape correcting capabilities of the deformable mirror. Using a high speed steering mirror coordinated with the deformable mirror actuation voltages, the ASOM operates by scanning over the workspace and should achieve diffraction limited imaging over a region approximately two orders of magnitude larger in area than a traditional microscope design. With the rapid scanning capabilities allowed by the high speed steering mirror and by acquiring a complete image during each exposure, the ASOM offers advantages in dynamically reconfigurable and adaptable imaging with no agitation to the workspace. After describing the design and operating principle of the ASOM, we present results from a low cost ASOM prototype.

Citation Download Citation

Benjamin Potsaid, Linda Ivonne Rivera, and John Ting-Yung Wen "Adaptive scanning optical microscope (ASOM): large field of view and high resolution imaging using a MEMS deformable mirror", Proc. SPIE 6467, MEMS Adaptive Optics, 646706 (9 February 2007); https://doi.org/10.1117/12.700538

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