MEMS reflective wavefront sensor

Jonathan R. Andrews; Scott W. Teare; Sergio R. Restaino; David Wick; Christopher C. Wilcox; Ty Martinez; Don M. Payne

doi:10.1117/12.702890

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9 February 2007 MEMS reflective wavefront sensor

Jonathan R. Andrews, Scott W. Teare, Sergio R. Restaino, David Wick, Christopher C. Wilcox, Ty Martinez, Don M. Payne

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Proceedings Volume 6467, MEMS Adaptive Optics; 64670A (2007) https://doi.org/10.1117/12.702890
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Sandia National Laboratory has constructed several segmented MEMS deformable mirrors that are under investigation for their suitability in Adaptive Optics systems for the Naval Research Laboratory. These mirrors are constructed in a hexagonal array and have been constructed with flat surfaces, or with optical power allowing each mirror to bring its subaperture of light to a focus similar to a Shack- Hartman array. Each mirror can use the tip, tilt and piston function to move the focused spots to the desired reference location, and the measurement of the applied voltage can be used directly to power a similar flat MEMS deformable mirror. This paper reports on the suitability of this reflective wavefront sensor for closed-loop Adaptive Optics applications.

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Jonathan R. Andrews, Scott W. Teare, Sergio R. Restaino, David Wick, Christopher C. Wilcox, Ty Martinez, and Don M. Payne "MEMS reflective wavefront sensor", Proc. SPIE 6467, MEMS Adaptive Optics, 64670A (9 February 2007); https://doi.org/10.1117/12.702890

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