Compact large-stroke piston tip-tilt actuator and mirror

W. Noell; A. Hugi; T. Overstolz; R. Stanley; S. Waldis; N. F. de Rooij

doi:10.1117/12.698937

14 February 2007 Compact large-stroke piston tip-tilt actuator and mirror

W. Noell, A. Hugi, T. Overstolz, R. Stanley, S. Waldis, N. F. de Rooij

Proceedings Volume 6467, MEMS Adaptive Optics; 64670Q (2007) https://doi.org/10.1117/12.698937
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 &mgr;m @ 80 V with good repeatability, and a tip-tilt of up to 2 mrad @ 50 V.

Citation Download Citation

W. Noell, A. Hugi, T. Overstolz, R. Stanley, S. Waldis, and N. F. de Rooij "Compact large-stroke piston tip-tilt actuator and mirror", Proc. SPIE 6467, MEMS Adaptive Optics, 64670Q (14 February 2007); https://doi.org/10.1117/12.698937

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