Design, processing, and materials for large-stroke actuators

Bautista Fernández; Joel Kubby

doi:10.1117/12.699665

6 February 2007 Design, processing, and materials for large-stroke actuators

Bautista Fernández, Joel Kubby

Proceedings Volume 6467, MEMS Adaptive Optics; 64670T (2007) https://doi.org/10.1117/12.699665
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

Adaptive optics (AO) applications in astronomy and vision science require deformable mirrors with larger stroke, higher packing density and at lower cost than currently available technology. The use of high-aspect ratio Micro-Electro- Mechanical Systems (MEMS) processing techniques to fabricate large-stroke actuators that can meet stroke, packing density and cost specifications for AO applications have been explored. Different actuator designs, materials and postprocessing procedures fabricated in two different high-aspect ratio processes have been investigated. These manufacturing processes allow high-precision multilayer fabrication, and both parallel plate and comb drive actuator deformable mirror designs have been created. Multilayer fabrication has reduced pull-in voltage requirements for large stroke comb-drive actuators. The design, modeling and simulation of these actuators are compared to experimental measurements of their pull-voltages, which characterizes their stiffness and maximum stroke.

Citation Download Citation

Bautista Fernández and Joel Kubby "Design, processing, and materials for large-stroke actuators", Proc. SPIE 6467, MEMS Adaptive Optics, 64670T (6 February 2007); https://doi.org/10.1117/12.699665

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