You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
6 February 2007Design, processing, and materials for large-stroke actuators
Adaptive optics (AO) applications in astronomy and vision science require deformable mirrors with larger stroke, higher
packing density and at lower cost than currently available technology. The use of high-aspect ratio Micro-Electro-
Mechanical Systems (MEMS) processing techniques to fabricate large-stroke actuators that can meet stroke, packing
density and cost specifications for AO applications have been explored. Different actuator designs, materials and postprocessing
procedures fabricated in two different high-aspect ratio processes have been investigated. These
manufacturing processes allow high-precision multilayer fabrication, and both parallel plate and comb drive actuator
deformable mirror designs have been created. Multilayer fabrication has reduced pull-in voltage requirements for large
stroke comb-drive actuators. The design, modeling and simulation of these actuators are compared to experimental
measurements of their pull-voltages, which characterizes their stiffness and maximum stroke.
The alert did not successfully save. Please try again later.
Bautista Fernández, Joel Kubby, "Design, processing, and materials for large-stroke actuators," Proc. SPIE 6467, MEMS Adaptive Optics, 64670T (6 February 2007); https://doi.org/10.1117/12.699665