Efficient and compact silicon-on-insulator rib waveguide 90 degree bends and splitters

Yusheng Qian; Seunghyun Kim; Jiquo Song; Gregory P. Nordin; Jianhua Jiang

doi:10.1117/12.700932

9 February 2007 Efficient and compact silicon-on-insulator rib waveguide 90 degree bends and splitters

Yusheng Qian, Seunghyun Kim, Jiquo Song, Gregory P. Nordin, Jianhua Jiang

Proceedings Volume 6477, Silicon Photonics II; 64770I (2007) https://doi.org/10.1117/12.700932
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Silicon-on-insulator (SOI) is a widely recognized as a very promising material for high-index integrated photonic chips because of its compatibility with complementary metal oxide semiconductor (CMOS) technologies. One challenge in integrating many photonic devices on a single chip is to realize compact waveguide bends and splitters, particularly for rib waveguide geometries. We report compact SOI rib waveguide 90° bends and splitters with SU8-filled trenches based on total internal reflection (TIR). We use the two-dimensional finite difference time domain (2D-FDTD) method to numerically calculate bend and splitter efficiencies. The maximum bend efficiency is 98.0%. The splitter efficiency is 49.0% for transmission and 48.9% for reflection with an 80 nm wide SU8-filled trench. Electron beam lithography (EBL) is used to accurately position the trench interface relative to the waveguides and to pattern the 80 nm wide trench. Inductively coupled plasma reactive ion etching (ICP RIE) is used to achieve a vertical sidewall. For fabricated bends the measured bend loss is 0.32±0.02 dB/bend (93% bend efficiency) for TE polarization at a wavelength of 1.55 microns, which is the lowest SOI rib waveguide 90° bend loss reported in literature. The initial measured splitter efficiency is 54.6% for transmission and 29.2% for reflection. This can be improved by avoiding defects in fabricated structures.

Citation Download Citation

Yusheng Qian, Seunghyun Kim, Jiquo Song, Gregory P. Nordin, and Jianhua Jiang "Efficient and compact silicon-on-insulator rib waveguide 90 degree bends and splitters", Proc. SPIE 6477, Silicon Photonics II, 64770I (9 February 2007); https://doi.org/10.1117/12.700932

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available