Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

Jun Hyuk Moon; Yongan Xu; Wenting Dong; Seung-Man Yang; Joseph W. Perry; Ali Adibi; Shu Yang

doi:10.1117/12.701168

6 February 2007 Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography

Jun Hyuk Moon, Yongan Xu, Wenting Dong, Seung-Man Yang, Joseph W. Perry, Ali Adibi, Shu Yang

Author Affiliations +

Proceedings Volume 6480, Photonic Crystal Materials and Devices VI; 64800P (2007) https://doi.org/10.1117/12.701168
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

Diamond-like silicon photonic crystals were fabricated by sequential chemical vapor deposition of silica and silicon on polymer templates photopatterned by holographic lithography. The optical properties of the 3D crystals after each processing step were measured and compared to the corresponding bandgap simulation. The core-shell morphology formed during CVD process is approximated using two level surfaces.

Citation Download Citation

Jun Hyuk Moon, Yongan Xu, Wenting Dong, Seung-Man Yang, Joseph W. Perry, Ali Adibi, and Shu Yang "Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography", Proc. SPIE 6480, Photonic Crystal Materials and Devices VI, 64800P (6 February 2007); https://doi.org/10.1117/12.701168

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