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21 February 2007 Development of fully depleted scientific CCDs for astronomy
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Abstract
Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kasey Boggs, Richard Bredthauer, and Michael Lesser "Development of fully depleted scientific CCDs for astronomy", Proc. SPIE 6501, Sensors, Cameras, and Systems for Scientific/Industrial Applications VIII, 650106 (21 February 2007); https://doi.org/10.1117/12.698409
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