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3 November 1986 Etched Mirror Corner Bend For Semiconductor Optical Circuits.
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Proceedings Volume 0651, Integrated Optical Circuit Engineering III; (1986) https://doi.org/10.1117/12.938133
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
Guided wave structures with directional changes will undoubtedly be required for integrated optical circuits. Reflections off an etched vertical wall are used to provide promising low loss bends.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. M. Benson "Etched Mirror Corner Bend For Semiconductor Optical Circuits.", Proc. SPIE 0651, Integrated Optical Circuit Engineering III, (3 November 1986); https://doi.org/10.1117/12.938133
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