Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles

Takeshi Higashiguchi; Sumihiro Suetake; Yusuke Senba; Yusuke Sato; Akira Hosotani; Yukari Takahashi; Shoichi Kubodera

doi:10.1117/12.711983

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21 March 2007 Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles

Takeshi Higashiguchi, Sumihiro Suetake, Yusuke Senba, Yusuke Sato, Akira Hosotani, Yukari Takahashi, Shoichi Kubodera

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Proceedings Volume 6517, Emerging Lithographic Technologies XI; 65173D (2007) https://doi.org/10.1117/12.711983
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Characteristics of suprathermal ions and neutral particles from a laser-produced tin plasma by use of a colloidal microjet target containing tin dioxide (SnO₂) nanoparticles were investigated. Suprathermal ion emissions were reduced by producing a low-density preplasma. Simultaneously, the maximum conversion efficiency of 1.2% at 13.5 nm with a bandwidth of 2% and a solid angle of 2&pgr; sr was observed. Neutral particles, however, were not suppressed under the optimum laser-plasma conditions.

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Takeshi Higashiguchi, Sumihiro Suetake, Yusuke Senba, Yusuke Sato, Akira Hosotani, Yukari Takahashi, and Shoichi Kubodera "Debris characteristics from a colloidal microjet target containing tin dioxide nano-particles", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65173D (21 March 2007); https://doi.org/10.1117/12.711983

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