Low-pressure drop filtration of airborne molecular organic contaminants using open-channel networks

Andrew J. Dallas; Jon Joriman; Lefei Ding; Gerald Weineck; Kevin Seguin

doi:10.1117/12.708302

5 April 2007 Low pressure drop filtration of airborne molecular organic contaminants using open-channel networks

Andrew J. Dallas, Jon Joriman, Lefei Ding, Gerald Weineck, Kevin Seguin

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 651846 (2007) https://doi.org/10.1117/12.708302
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Airborne molecular contamination (AMC) continues to play a very decisive role in the performance of many microelectronic devices and manufacturing processes. Besides airborne acids and bases, airborne organic contaminants such as 1-methyl-2-pyrrolidinone (NMP), hexamethyldisiloxane (HMDSO), trimethylsilanol (TMS), perfluoroalkylamines and condensables are of primary concern in these applications. Currently, the state of the filtration industry is such that optimum filter life and removal efficiency for organics is offered by granular carbon filter beds. However, the attributes that make packed beds of activated carbon extremely efficient also impart issues related to elevated filter weight and pressure drop. Most of the lower pressure drop AMC filters currently offered are quite expensive and are simply pleated combinations of various adsorptive and reactive media. On the other hand, low pressure drop filters, such as those designed as open-channel networks (OCN's), offer good filter life and removal efficiency with the additional benefits of significant reductions in overall filter weight and pressure drop. Equally important for many applications, the OCN filters can reconstruct the airflow so as to enhance the operation of a tool or process. For tool mount assemblies and fan filter units (FFUs) this can result in reduced fan and blower speeds, which subsequently can provide reduced vibration and energy costs. Additionally, these low pressure drop designs can provide a cost effective way of effectively removing AMC in full fab (or HVAC) filtration applications without significantly affecting air-handling requirements. Herein, we will present a new generation of low pressure drop OCN filters designed for the removal of airborne organics in a wide range of applications.

Citation Download Citation

Andrew J. Dallas, Jon Joriman, Lefei Ding, Gerald Weineck, and Kevin Seguin "Low pressure drop filtration of airborne molecular organic contaminants using open-channel networks", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 651846 (5 April 2007); https://doi.org/10.1117/12.708302

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available