Computer Aided Design (CAD) Of Thin Film Optical Coatings

M K Rao; Tan Chin Chye; Ow Chek Seng

doi:10.1117/12.938361

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13 October 1986 Computer Aided Design (CAD) Of Thin Film Optical Coatings

M K Rao, Tan Chin Chye, Ow Chek Seng

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Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938361
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

This paper presents description of a versatile software package for computer-aided design of thin film optical coatings, which has been developed by employing latest version of Turbo Pascal Language and can be run on any IBM or compatible personal computers. Both numerical and/or graphical output for transmittance and reflectance of a multilayer dielectric structure at various wavelengths are easily obtained. Other features in the package include interactive monitoring of thin film coatings during deposition process, saving of input parameters and results in the form of files, a look-up table for commonly used materials and facilities to provide parameters to an optical thickness monitor.

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M K Rao, Tan Chin Chye, and Ow Chek Seng "Computer Aided Design (CAD) Of Thin Film Optical Coatings", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938361

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