Measurement Of Scattering Distribution For Characterization Of The Roughness Of Coated Or Uncoated Substrates

F Roche; C Amra; E Pelletier

doi:10.1117/12.938388

13 October 1986 Measurement Of Scattering Distribution For Characterization Of The Roughness Of Coated Or Uncoated Substrates

F Roche, C Amra, E Pelletier

Author Affiliations +

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938388
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Measurement of spatial distribution of scattered flux combined with a vector theory of surface scattering, leads to the characterization of micropolishes in modern optics. Our techniques for transparent and non-transparent substrates are described. When applied to multilayer optical coatings, the scattering studies give informations on material microstructure defects. Recent developments realized in Marseilles in this field are analized.

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F Roche, C Amra, and E Pelletier "Measurement Of Scattering Distribution For Characterization Of The Roughness Of Coated Or Uncoated Substrates", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938388

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