Scanner-characteristics-aware OPC modeling and correction

Jacek K. Tyminski; Qiaolin Zhang; Kevin Lucas; Laurent Depre; Paul VanAdrichem

doi:10.1117/12.711624

21 March 2007 Scanner-characteristics-aware OPC modeling and correction

Jacek K. Tyminski, Qiaolin Zhang, Kevin Lucas, Laurent Depre, Paul VanAdrichem

Proceedings Volume 6521, Design for Manufacturability through Design-Process Integration; 65210Z (2007) https://doi.org/10.1117/12.711624
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

As scanner projection lens captures only a finite number of IC pattern diffraction orders. This low pass filtering leads to a range of optical proximity effects such as pitch-dependent CD variations, corner rounding and line-end pullback, resulting in imaged IC pattern excursions from the intended designs. These predictable OPEs are driven by the imaging conditions, such as wavelength, illuminator layout, reticle technology, and lens numerical aperture. To mitigate the pattern excursion due to OPEs, the photolithography community developed optical proximity correction methodologies, adopted and refined by the EDA industry. In the current implementations, OPC applied to IC designs can correct layouts to compensate for OPEs and to provide imaged patterns meeting the design requirements.

Citation Download Citation

Jacek K. Tyminski, Qiaolin Zhang, Kevin Lucas, Laurent Depre, and Paul VanAdrichem "Scanner-characteristics-aware OPC modeling and correction", Proc. SPIE 6521, Design for Manufacturability through Design-Process Integration, 65210Z (21 March 2007); https://doi.org/10.1117/12.711624

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available