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18 April 2007 Design and modeling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure, and temperature
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Abstract
A multifunctional optical MEMS sensor system that can be used for the simultaneous measurement of displacement, temperature, and pressure has been fabricated. The system is based on an array of micromachined Fabry-Perot devices suitable for high temperature and pressure operations. The central concept of the sensor system is that airflow force around the moving structure (air viscous damping) strongly affects the oscillating height of the microcavity and hence, the mechanical performance of the device. The major effect that the viscosity and the density of the air have on the damping provides the mechanism for the simultaneous detection of pressure and temperature in addition to displacement. Since the air is trapped by the viscous damping effects there is no need for a sealed cavity. In addition, the very simple configuration in the optical interferometric system can be considered for the integration in the sensor system package. A model to accurately predict the frequency response of the Fabry-Perot structure subjected to a mechanical excitation on the substrate at different pressures and temperatures is presented. The model shows that shifts of the order of 10.5°C and 7.46psi can be detected for temperatures and pressures around 536°C and 446psi respectively using 90μm long microcantilever beams vibrating at a frequency of 97.4 kHz. To the best of our knowledge, this sensor array is one of the few, if not the only MOEMS device in the literature capable of simultaneous measurement of displacement, temperature, and pressure in high temperature environments.
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P. M. Nieva, G. G. Adams, and N. E McGruer "Design and modeling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure, and temperature", Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 65292D (18 April 2007); https://doi.org/10.1117/12.716202
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