Evaluation And Control Of The Properties Of Thin Sputtered Silver Films For Spectrally Selective Coatings.

J Szczyrbowski; A Dietrich; K Hartig

doi:10.1117/12.938322

24 September 1986 Evaluation And Control Of The Properties Of Thin Sputtered Silver Films For Spectrally Selective Coatings.

J Szczyrbowski, A Dietrich, K Hartig

Author Affiliations +

Proceedings Volume 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V; (1986) https://doi.org/10.1117/12.938322
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

The influence of the deposition parameters on the electrical and optical properties of very thin silver films prepared by magnetron sputtering was studied. To evaluate the film properties a method was used, which is based on simple optical transmission measurements, and was proposed recently by one of the authors /1/. The results show that the specific resistivity, the plasma energy and the optical resistivity of films below 30 nm thickness are very sensitive to deposition parameters as cathode power density. It is concluded that the obtained variations in the optical and electrical properties are related to the density of the sputtered films.

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J Szczyrbowski, A Dietrich, and K Hartig "Evaluation And Control Of The Properties Of Thin Sputtered Silver Films For Spectrally Selective Coatings.", Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); https://doi.org/10.1117/12.938322

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