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3 May 2007Programmed defects study on masks for 45nm immersion lithography using the novel AIMS 45-193i
Mask manufacturing for the 45nm node for hyper NA lithography requires tight defect and printability control at small
features sizes. The AIMSTM1 technology is a well established methodology to analyze printability of mask defects,
repairs and critical features by scanner emulation. With the step towards hyper NA imaging by immersion lithography
the AIMSTM technology has been faced with new challenges like vector effects, polarized illumination and tighter specs
for repeatability and tool stability.
These requirements pushed the development of an entirely new AIMSTM generation. The AIMSTM 45-193i has been
designed and developed by Carl Zeiss to address these challenges. A new mechanical platform with a thermal and
environmental control unit enables high tool stability. Thus a new class of specification becomes available. The 193nm
optical beam path together with an improved beam homogenizer is dedicated to emulate scanners up to 1.4 NA. New
features like polarized illumination and vector effect emulation make the AIMSTM 45- 193i a powerful tool for defect
disposition and scanner emulation for 45nm immersion lithography.
In this paper results from one of the first production tools will be presented. Aerial images from phase shifting and
binary masks with different immersion relevant settings will be discussed. Also, data from a long term repeatability
study performed on masks with programmed defects will be shown. This study demonstrates the tool's ability to
perform defect disposition with high repeatability. It is found that the tool will fulfill the 45nm node requirements to
perform mask qualification for production use.
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Thomas Scherübl, Arndt C. Dürr, Klaus Böhm, Robert Birkner, Rigo Richter, Ulrich Strößner, "Programmed defects study on masks for 45nm immersion lithography using the novel AIMS 45-193i," Proc. SPIE 6533, 23rd European Mask and Lithography Conference, 653309 (3 May 2007); https://doi.org/10.1117/12.736530