Deflection of silicon dioxide microbridge under distributed load

Hao Li; Anirban Chakraborty; Xinchuan Liu; Hui Wang; Cheng Luo

doi:10.1117/12.721275

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3 May 2007 Deflection of silicon dioxide microbridge under distributed load

Hao Li, Anirban Chakraborty, Xinchuan Liu, Hui Wang, Cheng Luo

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Proceedings Volume 6556, Micro (MEMS) and Nanotechnologies for Defense and Security; 655608 (2007) https://doi.org/10.1117/12.721275
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

This paper reports our recent fabrication effort in producing suspended-silicon-nanowire based static sensors, which is an extension to our previous theoretical and numerical studies. The static sensor consists of four suspended silicon dioxide microwires and one silicon dioxide microplate. Each side of the microplate includes two silicon dioxide microwires, instead of one, to avoid the possible torsion of the microplate and make the microplate remain parallel to the substrate before detection. Most of the bridges are curved, instead of being straight, as simulated with the FEA software previously. Silicon dioxide microbridges were fabricated, and gold/Ni was deposited on the bridge surface. The resulting deflection was observed with Roughness Step Tester (RST).

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Hao Li, Anirban Chakraborty, Xinchuan Liu, Hui Wang, and Cheng Luo "Deflection of silicon dioxide microbridge under distributed load", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655608 (3 May 2007); https://doi.org/10.1117/12.721275

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