Nanolithography of metal catalysts by Dip Pen Nanolithography (DPN)

David Huitink; Debjyoti Banerjee; Saion K. Sinha

doi:10.1117/12.721252

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3 May 2007 Nanolithography of metal catalysts by Dip Pen Nanolithography

David Huitink, Debjyoti Banerjee, Saion K. Sinha

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Proceedings Volume 6556, Micro (MEMS) and Nanotechnologies for Defense and Security; 65560S (2007) https://doi.org/10.1117/12.721252
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

Nano-patterning of metals on gold film and silicon nitride membrane using Dip Pen Nanolithography (DPN^TM) is reported in this study. Using this technique, nano-particles can be delivered or nano-scale features of metals can be deposited precisely at specific locations using the unique registration capabilities of DPN. Monolayers of metal salts (FeCl₂, FeCl₃, PdCl₂, etc.) are deposited with nano-scale precision using DPN. These metal salts can be subsequerntly reduced to pure metals in a reducing environment for various applications (e.g., magnetic memory storage, nano-catalysis, molecular electronics, brand protection, nano-sensors, etc.). Square nano-patterns of Palladium and Iron salts were successfully deposited using this technique with thickness of the deposited materials being less than 1 nm.

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David Huitink, Debjyoti Banerjee, and Saion K. Sinha "Nanolithography of metal catalysts by Dip Pen Nanolithography", Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 65560S (3 May 2007); https://doi.org/10.1117/12.721252

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