Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling

O. Podzimek; L. H. J. F. Beckmann; J. A. Brok

doi:10.1117/12.938469

20 October 1986 Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling

O. Podzimek, L. H. J. F. Beckmann, J. A. Brok

Proceedings Volume 0656, Contemporary Optical Instrument Design, Fabrication, and Testing; (1986) https://doi.org/10.1117/12.938469
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Ion milling was studied as a method for removing a well defined amount of material from a spherically shaped surface to fabricate high quality aspheric germanium lenses. The ion-current density of the beam was determined as a function of the acceleration voltage and argon-gas flow in order to find near optimum conditions for smooth etching of the lens surface. The sputtering yield was studied as a function of the angle of incidence of the beam with respect to the target surface. Based upon these data, a computer program was designed, which controls the dwell time and the corresponding position of the lens with respect to the ion beam such as to generate a prescribed surface shape.

Citation Download Citation

O. Podzimek, L. H. J. F. Beckmann, and J. A. Brok "Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling", Proc. SPIE 0656, Contemporary Optical Instrument Design, Fabrication, and Testing, (20 October 1986); https://doi.org/10.1117/12.938469

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