Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy

Nabeel A. Riza; Sajjad A. Khan; Mumtaz Sheikh

doi:10.1117/12.717834

23 May 2007 Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy

Nabeel A. Riza, Sajjad A. Khan, Mumtaz Sheikh

Author Affiliations +

Proceedings Volume 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III; 65720Q (2007) https://doi.org/10.1117/12.717834
Event: Defense and Security Symposium, 2007, Orlando, Florida, United States

Abstract

An analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 &mgr;m continuous range optical height measurement sensor used to characterize a 2.3 &mgr;m height Indium Phosphide twin square optical waveguide chip.

Citation Download Citation

Nabeel A. Riza, Sajjad A. Khan, and Mumtaz Sheikh "Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy", Proc. SPIE 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III, 65720Q (23 May 2007); https://doi.org/10.1117/12.717834

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