Investigations on the passivation of thin film flow sensors on flexible substrates

U. Schmid; A. Ababneh; H. Seidel; R. Wagner; K. Bauer

doi:10.1117/12.723978

15 May 2007 Investigations on the passivation of thin film flow sensors on flexible substrates

U. Schmid, A. Ababneh, H. Seidel, R. Wagner, K. Bauer

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890H (2007) https://doi.org/10.1117/12.723978
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

To ensure an enhanced life-time of micromachined devices, passivation layers are commonly applied to protect functionalized components against environmental stress. For flow sensitive elements on a flexible polyimide foil the use of reactively sputter-deposited aluminium oxide is investigated. Due to a high defect density located at the interface between the passivation layer and the organic substrate, the adhesion of the pure aluminium oxide thin films on the organic substrate was found to be poor when applying a combination of mechanical and thermal treatment as an accelerated ageing procedure. A bi-layer consisting of aluminium nitride and aluminium oxide is proposed to enhance the low adhesion capability being strongly disadvantageous for any technical application.

Citation Download Citation

U. Schmid, A. Ababneh, H. Seidel, R. Wagner, and K. Bauer "Investigations on the passivation of thin film flow sensors on flexible substrates", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890H (15 May 2007); https://doi.org/10.1117/12.723978

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