Spectrophotometric and Raman spectroscopic characterization of ALD grown TiO2 thin films

Jaan Aarik; Aarne Kasikov; Ahti Niilisk

doi:10.1117/12.726492

25 January 2007 Spectrophotometric and Raman spectroscopic characterization of ALD grown TiO₂ thin films

Jaan Aarik, Aarne Kasikov, Ahti Niilisk

Proceedings Volume 6596, Advanced Optical Materials, Technologies, and Devices; 659616 (2007) https://doi.org/10.1117/12.726492
Event: Advanced Optical Materials, Technologies, and Devices, 2006, Vilnius, Lithuania

Abstract

Properties of titanium dioxide thin films grown by atomic layer deposition from TiCl₄ and H₂O on SiO₂ substrates were characterized using Raman spectroscopy and spectrophotometry methods. Raman spectroscopy revealed transformation of the film structure from amorphous to anatase, to anatase/rutile mixture and then back to anatase with the increase of deposition temperature from 100 to 680^oC. Variations in the growth rate, refractive index and extinction index accompanied these structural changes. Analysis of the transmission curves demonstrated that differently from amorphous films, the crystalline films were optically inhomogeneous in the growth direction.

Citation Download Citation

Jaan Aarik, Aarne Kasikov, and Ahti Niilisk "Spectrophotometric and Raman spectroscopic characterization of ALD grown TiO₂ thin films", Proc. SPIE 6596, Advanced Optical Materials, Technologies, and Devices, 659616 (25 January 2007); https://doi.org/10.1117/12.726492

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