Fluorine-resistant optics for high-energy KrF lasers

V. D. Zvorykin; R. V. Gaynutdinov; M. V. Isaev; A. O. Levchenko; S. I. Sagitov; P. B. Sergeev; D. B. Stavrovskii; N. N. Ustinovskii

doi:10.1117/12.740723

12 April 2007 Fluorine-resistant optics for high-energy KrF lasers

V. D. Zvorykin, R. V. Gaynutdinov, M. V. Isaev, A. O. Levchenko, S. I. Sagitov, P. B. Sergeev, D. B. Stavrovskii, N. N. Ustinovskii

Author Affiliations +

Proceedings Volume 6611, Laser Optics 2006: High-Power Gas Lasers; 66110M (2007) https://doi.org/10.1117/12.740723
Event: Laser Optics 2006, 2006, St. Petersburg, Russian Federation

Abstract

Protective single-layer, AR double-layer, and HR multi-layer fluorine-resistant coatings with damage thresholds as high as 20 J/cm² were deposited for the intracavity optics of high-energy KrF lasers by using different deposition techniques. They were tested by the atomic-force microscopy and IR Fourier spectrometry in regard of microstructure, porosity, water content, and in prolonged etching by fluorine. The most promising were NdF₃-based AR and HR coatings produced by e-beam evaporation, while outstandingly low water content was demonstrated for MgF₂ and Al₂O₃ layers deposited by laser evaporation with a preliminary laser treatment of substrates.

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V. D. Zvorykin, R. V. Gaynutdinov, M. V. Isaev, A. O. Levchenko, S. I. Sagitov, P. B. Sergeev, D. B. Stavrovskii, and N. N. Ustinovskii "Fluorine-resistant optics for high-energy KrF lasers", Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110M (12 April 2007); https://doi.org/10.1117/12.740723

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