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12 April 2007 Fluorine-resistant optics for high-energy KrF lasers
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Proceedings Volume 6611, Laser Optics 2006: High-Power Gas Lasers; 66110M (2007) https://doi.org/10.1117/12.740723
Event: Laser Optics 2006, 2006, St. Petersburg, Russian Federation
Abstract
Protective single-layer, AR double-layer, and HR multi-layer fluorine-resistant coatings with damage thresholds as high as 20 J/cm2 were deposited for the intracavity optics of high-energy KrF lasers by using different deposition techniques. They were tested by the atomic-force microscopy and IR Fourier spectrometry in regard of microstructure, porosity, water content, and in prolonged etching by fluorine. The most promising were NdF3-based AR and HR coatings produced by e-beam evaporation, while outstandingly low water content was demonstrated for MgF2 and Al2O3 layers deposited by laser evaporation with a preliminary laser treatment of substrates.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. D. Zvorykin, R. V. Gaynutdinov, M. V. Isaev, A. O. Levchenko, S. I. Sagitov, P. B. Sergeev, D. B. Stavrovskii, and N. N. Ustinovskii "Fluorine-resistant optics for high-energy KrF lasers", Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110M (12 April 2007); https://doi.org/10.1117/12.740723
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