Two-dimensional method for surface determination by optical deflectometry

A. Moreno; M. Espínola; A. Lizana; J. Campos

doi:10.1117/12.729630

18 June 2007 Two-dimensional method for surface determination by optical deflectometry

A. Moreno, M. Espínola, A. Lizana, J. Campos

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66162J (2007) https://doi.org/10.1117/12.729630
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Deflectometry is an optical metrological technique to determine the shape of test surfaces. This technique is based on the measure of the deviation that the light suffers when impinges the test surface and is reflected. The information of the surface slopes is contained in the reflection angle. Then, the integration of the slopes is necessary to obtain the final profile of the surfaces. In this work, we present a brief review of two dimensional integration methods and we propose a new two dimensional integration method. A comparison of the integration methods is presented in term of the mean quadratic error between the original profile and the profile obtained by integration.

Citation Download Citation

A. Moreno, M. Espínola, A. Lizana, and J. Campos "Two-dimensional method for surface determination by optical deflectometry", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162J (18 June 2007); https://doi.org/10.1117/12.729630

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available