Fabrication of microsphere plate electron multiplier device

Xin Wang; Ye Li; Guozheng Wang; Yanjun Gao; Delong Jiang; Kui Wu; Shencheng Fu; Qingduo Duanmu; Jingquan Tian

doi:10.1117/12.790595

3 March 2008 Fabrication of microsphere plate electron multiplier device

Xin Wang, Ye Li, Guozheng Wang, Yanjun Gao, Delong Jiang, Kui Wu, Shencheng Fu, Qingduo Duanmu, Jingquan Tian

Proceedings Volume 6621, International Symposium on Photoelectronic Detection and Imaging 2007: Photoelectronic Imaging and Detection; 66210D (2008) https://doi.org/10.1117/12.790595
Event: International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007, 2007, Beijing, China

Abstract

Microsphere plate (MSP) is a new type of electron multiplier device. It is similar to the traditional microchannel plate (MCP) in dimensions and model of operation. Compared with the MCP electron multiplier, the MSP has some unique characteristics such as a high electron gain, without ion feedback and easy to be fabricated, thus it is widely used in the fields of imaging and detecting. However, there are some key technologies to fabricate a satisfied MSP. In this paper, the whole fabrication process of MSP was introduced and some of major processes such as the formation of glass beads, the sintering of MSP body, and the formation of dynode and electrodes were specially discussed. At the end of the paper, the optimal processed for the fabrication of MSP was given.

Citation Download Citation

Xin Wang, Ye Li, Guozheng Wang, Yanjun Gao, Delong Jiang, Kui Wu, Shencheng Fu, Qingduo Duanmu, and Jingquan Tian "Fabrication of microsphere plate electron multiplier device", Proc. SPIE 6621, International Symposium on Photoelectronic Detection and Imaging 2007: Photoelectronic Imaging and Detection, 66210D (3 March 2008); https://doi.org/10.1117/12.790595

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