Ion channeling and implantation into Cu (100) and Cu3Au (100)

A. M. Rasulov

doi:10.1117/12.741886

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2 May 2007 Ion channeling and implantation into Cu (100) and Cu₃Au (100)

A. M. Rasulov

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Proceedings Volume 6634, International Conference on Charged and Neutral Particles Channeling Phenomena II; 66340O (2007) https://doi.org/10.1117/12.741886
Event: International Conference on Charged and Neutral Particles Channeling Phenomena II, 2006, Rome, Italy

Abstract

Dynamics of the trajectory change has been simulated in order to study the energy losses of channeled ions as well as the angular and energy distributions of ions transmitted through a thin crystal as the functions of single crystal composition, of impact parameters with respect to the channel center and of initial energy. It has been established that the inelastic interactions define the main energy loss for a paraxial part of channeled beam. The elastic energy losses for channeled ions are larger in a Cu₃Au (100) crystal than in a Cu (100). Because of the fact that Au atoms are heavier than Cu atoms, in a case of Cu₃Au (100) the ion dechanneling rate is greater and the channeling range is smaller in comparison with the similar characteristics for Cu (100).

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A. M. Rasulov "Ion channeling and implantation into Cu (100) and Cu₃Au (100)", Proc. SPIE 6634, International Conference on Charged and Neutral Particles Channeling Phenomena II, 66340O (2 May 2007); https://doi.org/10.1117/12.741886

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