Hardware simulator for design and characterization of MOEMS for environmental applications

Florin Caldararu; Alexandru Vasile; Mira Caldararu

doi:10.1117/12.741872

8 May 2007 Hardware simulator for design and characterization of MOEMS for environmental applications

Florin Caldararu, Alexandru Vasile, Mira Caldararu

Proceedings Volume 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III; 66350A (2007) https://doi.org/10.1117/12.741872
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 2006, Bucharest, Romania

Abstract

The MOEMS for enviromnental applications have a complex structure architecture: a sensitive layer for environment interface, optical devices for radiation beam processing (waveguides on semiconductor) and photodiodes. The sensor includes an electronic module, used as transimpedance amplifier and phase shift detector and a radiation source coupled to the waveguide. Each of these sensor modules have specific parameters which must be optimized in order to obtain the best sensitivity for MOEMS, as well as to determine the appropriate concentration domain. The optimization process involves a great number of parameters and boundary conditions, so that a mathematical model is not sufficient. In this paper a hardware simulator for MOEMS design and characterization is presented. The structure and dynamics of environmental signal, the beani radiation processing and the power transfer from the environmental signal to the photogenerated current are physically simulated. An application of this simulator for design and characterization of aimnonia measurement MOEMS is presented.

Citation Download Citation

Florin Caldararu, Alexandru Vasile, and Mira Caldararu "Hardware simulator for design and characterization of MOEMS for environmental applications", Proc. SPIE 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 66350A (8 May 2007); https://doi.org/10.1117/12.741872

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