Combining coordinate measurement and nanometrology for large-range nanoscale metrology

Martin Gruhlke; Hendrik Rothe

doi:10.1117/12.733527

10 September 2007 Combining coordinate measurement and nanometrology for large-range nanoscale metrology

Martin Gruhlke, Hendrik Rothe

Proceedings Volume 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing; 66480I (2007) https://doi.org/10.1117/12.733527
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

The Nanometer-Coordinate-Measuring-Machine (NCMM) is developed for comparatively fast large area scans with high resolution for measuring critical dimensions. The system combines a metrological atomic force microscope (AFM) with a precise positioning system. The sample is moved under the probe system via the positioning system achieving a scan range of 25 x 25 x 5 mm³ with a resolution of 1.24 nm. An AFM has a resolution beyond the wavelength of light and is a material-variable sensor. The cantilever of the used AFM can only be moved up and down via a monolytic piezoblock avoiding dynamic crosstalk. Combined with the up and down movement of the positioning system a multistage measurement is achieved. Through its overall coordinate system, the NCMM can scan very fast, since just regions of interest have to be scanned and no stitching procedures are needed afterwards. The measurements are traceable to the meter-definition since all movements of the drives and the AFMs cantilever are measured via laser-interferometers and the Abbé-principle is kept in every dimension. To meet thermal demands, materials with low thermal expansion coefficients are used and the metrological frame is kept small. A focus is on automating the measurements by the use of a-priori-knowledge of the sample, optical navigation and image processing.

Citation Download Citation

Martin Gruhlke and Hendrik Rothe "Combining coordinate measurement and nanometrology for large-range nanoscale metrology", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480I (10 September 2007); https://doi.org/10.1117/12.733527

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available