3D phase micro-object studies by means of digital holographic tomography supported by algebraic reconstruction technique

B. J. Bilski; A. Jozwicka; M. Kujawinska

doi:10.1117/12.737314

10 September 2007 3D phase micro-object studies by means of digital holographic tomography supported by algebraic reconstruction technique

B. J. Bilski, A. Jozwicka, M. Kujawinska

Author Affiliations +

Proceedings Volume 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III; 66720A (2007) https://doi.org/10.1117/12.737314
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Constant development of microelements' technology requires a creation of new instruments to determine their basic physical parameters in 3D. The most efficient non-destructive method providing 3D information is tomography. In this paper we present Digital Holographic Tomography (DHT), in which input data is provided by means of Di-git- al Holography (DH). The main advantage of DH is the capability to capture several projections with a single hologram [1]. However, these projections have uneven angular distribution and their number is significantly limited. Therefore - Algebraic Reconstruction Technique (ART), where a few phase projections may be sufficient for proper 3D phase reconstruction, is implemented. The error analysis of the method and its additional limitations due to shape and dimensions of investigated object are presented. Finally, the results of ART application to DHT method are also presented on data reconstructed from numerically generated hologram of a multimode fibre.

Citation Download Citation

B. J. Bilski, A. Jozwicka, and M. Kujawinska "3D phase micro-object studies by means of digital holographic tomography supported by algebraic reconstruction technique", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720A (10 September 2007); https://doi.org/10.1117/12.737314

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