Paper
10 September 2007 Limitations of Rayleigh Rice Perturbation Theory for describing surface scatter
Author Affiliations +
Abstract
For over three decades the Rayleigh Rice Perturbation Theory has been the method of choice for relating the surface power spectral density function (PSD) of smooth, clean, front surface reflectors to corresponding scatter patterns. This paper explores limitations with this traditional approach. In particular the annoying (anomalous) "hooks" at the high frequency (near grazing) end of a calculated PSD are investigated. In addition the smooth surface requirement is also probed for its limit. Experimental data involving different materials and wavelengths as well as variations in source polarization and incident angle are presented. The same data set is also used in a follow-on paper suggesting theoretical variations that may solve some of these issues.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John C. Stover and James E. Harvey "Limitations of Rayleigh Rice Perturbation Theory for describing surface scatter", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720B (10 September 2007); https://doi.org/10.1117/12.739133
Lens.org Logo
CITATIONS
Cited by 8 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Bidirectional reflectance transmission function

Spatial frequencies

Silicon

Gold

Reflectors

Light scattering

Semiconducting wafers

Back to Top