Fabrication of indium tin oxide (ITO) thin films by spin-coating deposition method

P. Psuja; W. Strek

doi:10.1117/12.735714

21 September 2007 Fabrication of indium tin oxide (ITO) thin films by spin-coating deposition method

P. Psuja, W. Strek

Proceedings Volume 6674, Thin-Film Coatings for Optical Applications IV; 667408 (2007) https://doi.org/10.1117/12.735714
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

The indium tin oxide (ITO) is one of the most popular transparent conductive oxide (TCO). The process of fabrication of ITO nanocrystallites has been described in our previous work. In present work the ITO layers were deposited on glass substrates by spin-coating method.. For some solutions ITO, SnO₂ and In₂O₃ nanocrystals were added. All those nanocrystals were synthesized by modified Pechini method. Optical and electrical properties of the layers were measured, compared and discussed.

Citation Download Citation

P. Psuja and W. Strek "Fabrication of indium tin oxide (ITO) thin films by spin-coating deposition method", Proc. SPIE 6674, Thin-Film Coatings for Optical Applications IV, 667408 (21 September 2007); https://doi.org/10.1117/12.735714

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