Applications Of Beam-Solid Interactions In Semiconductor Material And Device Processing

John C.C Fan

doi:10.1117/12.938888

12 November 1986 Applications Of Beam-Solid Interactions In Semiconductor Material And Device Processing

John C.C Fan

Proceedings Volume 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering; (1986) https://doi.org/10.1117/12.938888
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

Pulsed or scanned energy beams have been shown to be very useful for many semiconductor applications, ranging from annealing of ion-implanted damage to preparation of materials.

Citation Download Citation

John C.C Fan "Applications Of Beam-Solid Interactions In Semiconductor Material And Device Processing", Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); https://doi.org/10.1117/12.938888

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