Progress in x-ray optics development with formed glass and Si wafers

R. Hudec; L. Pina; V. Semencova; M. Skulinova; A. Inneman; L. Sveda; M. Mika; R. Kacerovsky; J. Prokop; M. Cerny

doi:10.1117/12.731727

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20 September 2007 Progress in x-ray optics development with formed glass and Si wafers

R. Hudec, L. Pina, V. Semencova, M. Skulinova, A. Inneman, L. Sveda, M. Mika, R. Kacerovsky, J. Prokop, M. Cerny

Author Affiliations +

Proceedings Volume 6688, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III; 668810 (2007) https://doi.org/10.1117/12.731727
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

The precisely shaped glass sheets and Si wafers are generally considered as the most promising substrates for future large space astronomical X-ray telescopes. Both approaches have demonstrated promising results obtained in the course of last years. In this contribution, we report on continued systematic efforts and analysis in precise shaping of thin glass sheets as well as Si wafers. New results will be briefly presented and discussed. For Si wafers, recent efforts focus also on improving the intrinsic quality of the slices to better meet the high requirements of future space projects.

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R. Hudec, L. Pina, V. Semencova, M. Skulinova, A. Inneman, L. Sveda, M. Mika, R. Kacerovsky, J. Prokop, and M. Cerny "Progress in x-ray optics development with formed glass and Si wafers", Proc. SPIE 6688, Optics for EUV, X-Ray, and Gamma-Ray Astronomy III, 668810 (20 September 2007); https://doi.org/10.1117/12.731727

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