Nanoscale ablation with soft x-ray lasers

Fernando Brizuela; Herman Bravo; Georgiy Vaschenko; Mark Berrill; Benjamin Langdon; Carmen S. Menoni; Oscar Hemberg; Scott Bloom; Weilun Chao; Erik H. Anderson; David T. Attwood Jr.; Jorge J. Rocca

doi:10.1117/12.733401

12 October 2007 Nanoscale ablation with soft x-ray lasers

Fernando Brizuela, Herman Bravo, Georgiy Vaschenko, Mark Berrill, Benjamin Langdon, Carmen S. Menoni, Oscar Hemberg, Scott Bloom, Weilun Chao, Erik H. Anderson, David T. Attwood Jr., Jorge J. Rocca

Author Affiliations +

Proceedings Volume 6702, Soft X-Ray Lasers and Applications VII; 67020L (2007) https://doi.org/10.1117/12.733401
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge soft x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

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Fernando Brizuela, Herman Bravo, Georgiy Vaschenko, Mark Berrill, Benjamin Langdon, Carmen S. Menoni, Oscar Hemberg, Scott Bloom, Weilun Chao, Erik H. Anderson, David T. Attwood Jr., and Jorge J. Rocca "Nanoscale ablation with soft x-ray lasers", Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020L (12 October 2007); https://doi.org/10.1117/12.733401

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