High spatial resolution full-field microscopy using a desktop-size soft x-ray laser

Courtney A. Brewer; Fernando Brizuela; Dale Martz; Georgiy Vaschenko; Mario C. Marconi; Weilun Chao; Erik H. Anderson; David T. Attwood Jr.; Alexander V. Vinogradov; Igor A. Artioukov; Yuriy P. Pershyn; Valeriy V. Kondratenko; Jorge J. Rocca; Carmen S. Menoni

doi:10.1117/12.733422

12 October 2007 High spatial resolution full-field microscopy using a desktop-size soft x-ray laser

Courtney A. Brewer, Fernando Brizuela, Dale Martz, Georgiy Vaschenko, Mario C. Marconi, Weilun Chao, Erik H. Anderson, David T. Attwood Jr., Alexander V. Vinogradov, Igor A. Artioukov, Yuriy P. Pershyn, Valeriy V. Kondratenko, Jorge J. Rocca, Carmen S. Menoni

Author Affiliations +

Proceedings Volume 6702, Soft X-Ray Lasers and Applications VII; 67020M (2007) https://doi.org/10.1117/12.733422
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hν; = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.

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Courtney A. Brewer, Fernando Brizuela, Dale Martz, Georgiy Vaschenko, Mario C. Marconi, Weilun Chao, Erik H. Anderson, David T. Attwood Jr., Alexander V. Vinogradov, Igor A. Artioukov, Yuriy P. Pershyn, Valeriy V. Kondratenko, Jorge J. Rocca, and Carmen S. Menoni "High spatial resolution full-field microscopy using a desktop-size soft x-ray laser", Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020M (12 October 2007); https://doi.org/10.1117/12.733422

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