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10 October 2007 Optical beam steering using a 2D MEMS scanner
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Proceedings Volume 6715, Optomechatronic Actuators and Manipulation III; 671502 (2007) https://doi.org/10.1117/12.754170
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland
Abstract
This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light comping from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frewquency measurements agree with the simulated ones.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves Pétremand, Pierre-André Clerc, Marc Epitaux, Ralf Hauffe, Wilfried Noell, and N. F. de Rooij "Optical beam steering using a 2D MEMS scanner", Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 671502 (10 October 2007); https://doi.org/10.1117/12.754170
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