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5 September 2007 Design of a PMN-PT-based monolithic nanomanipulator
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Proceedings Volume 6715, Optomechatronic Actuators and Manipulation III; 67150B (2007) https://doi.org/10.1117/12.754373
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland
Abstract
In this paper, a cantilever-based manipulator using (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) single-crystal relaxor ferroelectric material is presented. We report the design of a novel piezoelectric multi-degree-of-freedom motion cantilever. The structure has interdigitated electrode (IDE) on the top and bottom surfaces of the cantilever and possesses both longitudinal and flexural actuation capabilities. PMN-PT materials are ideal for actuator applications since they exhibit a very high piezoelectric strain. We separately pattern interdigitated electrode (IDE) on the top and bottom surfaces of a single crystal cantilever beam. Furthermore, we propose a novel L-shaped cantilever manipulator that can provide up to four-degrees of freedom motion. The small and planar structure has potential applications in optical beam steering systems and nano-manipulators inside a scanning electron microscope.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kee S. Moon, Jingang Yi, Yong K. Hong, and J.A.L. Mathers III "Design of a PMN-PT-based monolithic nanomanipulator", Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 67150B (5 September 2007); https://doi.org/10.1117/12.754373
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