The main aim of this work is to allow the automated but nevertheless flexible sensor guided micro assembly with a new
3D vision sensor. The practical application of the sensor guided assembly of micro systems is realised with a special
micro assembly system, which contains a parallel robot, an innovative 3D vision sensor, micro grippers and workpiece
fixtures. The 3D vision sensor, which is arranged directly above the assembly place and moved synchronized to the
micro gripper, makes the uninterrupted observation of the workpiece and the determination of its position possible, in
this way allowing the sensor guided assembly of micro systems and a detailed analysis of the principles in the micro
assembly process. The basic principle of this photogrammetric measurement concept is given through the fiducial
marks. The circular fiducial marks will be realised within the photolithographic production of the components. Using
these fiducial marks it is possible to measure the relative position of the components during assembly without reference
to their exterior shape.
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