Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer

Zhongliang Li; Xiangzhao Wang; Bingjie Huang; Peng Bu; Defeng Zheng

doi:10.1117/12.783072

17 January 2008 Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer

Zhongliang Li, Xiangzhao Wang, Bingjie Huang, Peng Bu, Defeng Zheng

Author Affiliations +

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67230Y (2008) https://doi.org/10.1117/12.783072
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

In a conventional sinusoidal phase-modulating laser-diode (SPM-LD) interferometer, the wavelength of LD is sinusoidally modulated by varying its injection current. However, the intensity modulation is associated with wavelength modulation, which affects the measurement accuracy. We propose here a method to eliminate the effect of intensity modulation by choosing appropriate modulation depth for sinusoidal phase modulation in a SPM-LD interferometer. The method is verified by computer simulation and experiment for real-time displacement measurement. The measurement accuracy has been improved and the measurement repeatability is less than 1 nm.

Citation Download Citation

Zhongliang Li, Xiangzhao Wang, Bingjie Huang, Peng Bu, and Defeng Zheng "Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67230Y (17 January 2008); https://doi.org/10.1117/12.783072

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