Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering

Yue-Bo Wu; Bo Huang; Liang-Tang Zhang; Jing Li; Sun-Tao Wu

doi:10.1117/12.783325

27 November 2007 Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering

Yue-Bo Wu, Bo Huang, Liang-Tang Zhang, Jing Li, Sun-Tao Wu

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67232P (2007) https://doi.org/10.1117/12.783325
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The Al-doped ZnO (AZO) films were deposited on glass by RF magnetron sputtering under different sputtering power: 75W, 120W, 160W and 200W. During the films deposition, the other sputtering conditions were maintained constant. The crystal structures of the AZO films were characterized and analyzed by X-ray diffraction. The surface morphologies of the films were observed by SEM. The transmission spectra of the films were measured using a spectrophotometer within the range from 200 to 800 nm at room temperature. The results indicate each of the films has a preferential c-axis orientation and the grain size increases with the increase of sputtering power. All the films exhibit a high transmittance in visible region and have sharp ultraviolet absorption characteristics.

Citation Download Citation

Yue-Bo Wu, Bo Huang, Liang-Tang Zhang, Jing Li, and Sun-Tao Wu "Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67232P (27 November 2007); https://doi.org/10.1117/12.783325

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